In the era of advanced nano-manufacturing, semiconductor wafer fabrication has entered a stage where every single particle matters. A common industry misconception is that passing tests with a 0.3μm particle counter ensures a secure environment. In reality, 0.1μm ultra-fine particles are the most dangerous "invisible killers" on advanced production lines. A single particle can cause transistor short circuits, resulting in entire wafers being scrapped; over 70% of chip yield losses are attributed to such sub-micron contamination.

Conventional particle counters are often limited by technology, failing to detect 0.1μm suspended particles. Consequently, latent contamination in photolithography and etching workshops goes unnoticed until batch defects occur, leading to irreversible production losses and difficulty in meeting ISO Class 1 cleanliness compliance.

Designed specifically for high-precision cleanroom environments, the LPC-S101 Particle Counter breaks through the 0.3μm detection bottleneck, achieving precise monitoring of 0.1μm ultra-fine particles. With intelligent data management and full-process traceability, it caters to the stringent monitoring requirements of the semiconductor, optics, pharmaceutical, and aerospace industries. By identifying airborne particle risks at the source, the LPC-S101 builds a robust nano-level protective barrier for your production lines.

Shanghai Lasensor LPC-S101 Airborne Particle Counter

Product Overview

LPC-S101 Particle Counter — A nano-level cleanroom defense for advanced semiconductor processes.

Specifically designed for high-precision cleanroom monitoring in the semiconductor industry, the LPC-S101 is equipped with 0.1μm ultra-fine particle detection technology. It breaks through the limitations of traditional 0.3μm precision, accurately capturing sub-micron contamination particles generated by photoresist evaporation and equipment wear. It meets the rigorous requirements for ISO Class 1 cleanliness in nano-manufacturing processes and is fully compliant with the ISO 21501-4 and the new national standard GB/T 29024.4-2017.

Product Features

Technological Breakthrough in Ultra-Fine Particle Detection

The LPC-S101 Particle Counter is designed to measure the size and quantity of airborne particles per unit volume in clean environments. With a minimum particle size sensitivity of 0.1μm, it is capable of monitoring cleanroom environments ranging from ISO Class 7 down to ISO Class 1. Utilizing a semiconductor laser light source, the instrument offers high detection precision, user-friendly operation, and exceptional convenience for environmental testing. This product is widely applied across various sectors, including semiconductors, electronics, optics, chemistry, food, cosmetics, pharmaceuticals, biological products, and aerospace.

Intelligent Data Management

• 7/8-inch Touchscreen: Displays particle concentrations in 8 channels in real-time and automatically generates cleanliness grade reports compliant with ISO 14644-1.

• Massive Storage & Cloud Connectivity: Supports local storage of up to 100,000 data records (with support for time and location tagging).

• System Integration: Equipped with an RS232 interface for seamless connection to SCADA/MES systems, meeting the electronic audit requirements of FDA 21 CFR Part 11.

Technicial Specifications

About Lasensor

Shanghai Lasensor Photoelectric Technology Co., Ltd. is a high-tech enterprise founded in 2017 in the Jiading CAS (Chinese Academy of Sciences) Shenguang Industrial Park, based on the scientific research achievements of a team from the Shanghai Institute of Optics and Fine Mechanics. The company is dedicated to the research and production of accurate, efficient, and real-time measurement and diagnostic instruments based on laser detection technology. We are currently among the few manufacturers globally capable of providing a full range of 0.1μm particle counters, with counting efficiency comparable to top-tier international instruments. We are committed to providing excellent cost-performance, superior service, and flexible, exclusive customization.

Our products are widely trusted in the domestic market for their outstanding performance and reliability. Furthermore, they have been successfully exported overseas, covering Southeast Asian regions including Vietnam, Thailand, Malaysia, and Singapore, and extending to countries such as Italy, Belgium, and New Zealand, winning widespread recognition from international clients. The company looks forward to cooperating with all sectors of society to become a solid foundation for smart cities and intelligent manufacturing.