As we enter the era of advanced nano-manufacturing, semiconductor wafer fabrication has reached a stage where every single particle matters. A common industry misconception is that passing tests with a 0.3μm particle counter ensures a secure environment. In reality, 0.1μm ultra-fine particles are the most dangerous "invisible killers" on advanced production lines; a single particle can cause transistor short circuits, resulting in entire wafers being scrapped, and over 70% of chip yield losses are attributed to such sub-micron contamination.

Conventional particle counters are often limited by technology, failing to detect 0.1μm suspended particles. Consequently, latent contamination in photolithography and etching workshops remains undetected until batch defects occur, leading to irreversible production losses and difficulty in meeting ISO Class 1 cleanliness compliance.

Designed specifically for high-precision cleanroom environments, the LPC-S110 Particle Counter breaks through the 0.3μm detection bottleneck, achieving precise monitoring of 0.1μm ultra-fine particles. With intelligent data management and full-process traceability, it caters to the stringent monitoring requirements of the semiconductor, optics, pharmaceutical, and aerospace industries. By identifying airborne particle risks at the source, the LPC-S110 builds a robust nano-level protective barrier for your production lines.

Product Overview

LPC-S110 Particle Counter — A nano-level cleanroom defense for advanced semiconductor processes.Designed specifically for high-precision cleanroom environment monitoring in the semiconductor industry, the LPC-S110 is equipped with 0.1μm ultra-fine particle detection technology. It breaks through the traditional 0.3μm precision limitation to accurately capture sub-micron contamination particles caused by photoresist evaporation and equipment wear, meeting the rigorous ISO Class 1 cleanliness requirements for nano-manufacturing processes. It complies with both ISO 21501-4 and the new national standard GB/T 29024.4-2017.

Product Features

• Technological Breakthrough in Ultra-Fine Particle Detection

• The LPC-S110 particle counter is used to measure the size and quantity of dust particles per unit volume of air in clean environments.

• It offers a minimum particle size sensitivity of 0.1μm and is capable of monitoring cleanroom environments from ISO Class 7 to ISO Class 1.

• The instrument utilizes a semiconductor laser light source, ensuring high detection accuracy and straightforward operation, making it highly convenient for environmental testing.

• This product is widely applicable across sectors such as semiconductors, electronics, optics, chemistry, food, cosmetics, pharmaceuticals, biological products, and aerospace.

• Intelligent Data Management

• 7/8-inch Touchscreen: Real-time display of 8-channel particle concentration with automatic generation of ISO 14644-1 cleanliness grade reports.

• Massive Storage + Cloud Connectivity: Supports local storage of 1,000,000 data records (including time/location tags) and features a network port for seamless integration with SCADA/MES systems, meeting FDA 21 CFR Part 11 electronic audit requirements.





About Lasensor

Shanghai Lasensor Photoelectric Technology Co., Ltd. is a high-tech enterprise founded in 2017 in the Jiading CAS (Chinese Academy of Sciences) Shenguang Industrial Park, based on the scientific research achievements of a team from the Shanghai Institute of Optics and Fine Mechanics. The company is dedicated to the research and production of accurate, efficient, and real-time measurement and diagnostic instruments based on laser detection technology. We are currently among the few manufacturers globally capable of providing a full range of 0.1μm particle counters, with counting efficiency comparable to top-tier international instruments. We are committed to providing excellent cost-performance, superior service, and flexible, exclusive customization.

Our products are widely trusted in the domestic market for their outstanding performance and reliability. Furthermore, they have been successfully exported overseas, covering Southeast Asian regions including Vietnam, Thailand, Malaysia, and Singapore, and extending to countries such as Italy, Belgium, and New Zealand, winning widespread recognition from international clients. The company looks forward to cooperating with all sectors of society to become a solid foundation for smart cities and intelligent manufacturing.