18 YEARS EXPERIENCE
There are more than 30 products to choose from to meet your every need.
Products Description
A common misconception in cleanroom environmental control is that meeting airborne particle requirements does not necessarily mean achieving overall cleanliness. Fine particles as small as 0.1 μm and 0.5 μm can easily settle and adhere to equipment surfaces, products, walls, and floors. These static surface particles can significantly increase the risk of product defects and cross-contamination, and are also one of the major causes of non-conformities identified during cleanroom audits.
Traditional particle counters can only detect airborne suspended particles and are unable to monitor deposited surface contamination, which may result in a “false pass” of environmental cleanliness assessment and lead to losses such as product scrapping.
The Surface Particle Counter addresses this detection gap by utilizing non-contact rapid sampling technology to quantify surface contamination levels and accurately identify contamination locations. Compliant with requirements of standards such as ISO 14644 and GMP, it enables proactive contamination control, reduces the occurrence of defective products at the source, and ensures stable production operations. It has become an essential detection instrument in modern cleanroom environmental monitoring systems.
1
Product Overview
The Surface Particle Counter is a highly sensitive particle detection instrument designed for advanced manufacturing, semiconductor processes, optoelectronic displays, and precision machining applications. Based on light scattering detection technology and intelligent recognition algorithms, it enables real-time detection and quantitative analysis of microscopic particles, dust, and contaminants on material surfaces, helping users accurately evaluate cleanliness levels and improve production yield and quality control performance.
Developed entirely by a domestic R&D team, the instrument has achieved independent innovation and localization breakthroughs in core optical systems, algorithms, and electronic modules. It provides a high-performance particle detection solution capable of replacing imported equipment.
Testing Process
During measurement, the probe scans across the surface of the sample. Particles on the surface are aerodynamically mobilized by a high-pressure airflow discharged through the scanning head opening. These particles are then transported through the probe tubing into the surface particle detection unit, where particle levels are measured and recorded.
The measurement results are displayed as raw particle counts, particles/in², or particles/cm².
The system utilizes a solid-state laser diode light source and precision collection optics to detect and determine the size of particles drawn from the scanning head. The optical collection system focuses scattered light onto a photodetector, which converts optical pulses into electrical pulses. The pulse amplitude is proportional to particle size.
By applying laser light scattering technology, the instrument quantitatively evaluates the relative level of surface particle contamination and provides accurate surface cleanliness assessment.
2
Product Features
🔹 Highly Integrated Sampling Probe
The sampling probe integrates both inlet and outlet airflow channels into a compact structure. The probe material features excellent chemical stability, anti-static properties, and wear resistance.
While efficiently sweeping and removing particles within the scanned surface area, the probe ensures that collected particles are completely transported through the sampling line into the optical detection chamber, delivering accurate, sensitive, and reliable measurement results.
🔹 Automatic Calibration Algorithm
The intelligent algorithm automatically identifies particle signals and classifies particle size ranges, reducing human error and improving measurement consistency and repeatability.
🔹 Real-Time Visual Analysis Platform
High-speed signal acquisition combined with advanced data processing algorithms enables intuitive graphical visualization of measurement results, including:
Particle size distribution curves
Particle density trends
Abnormal contamination alerts
Providing users with clear insights for process traceability and quality evaluation.
🔹 Modular Design for Multi-Scenario Applications
The instrument adopts a main unit + interchangeable probe design, allowing flexible detection on various complex surfaces, including:
Flat surfaces
Grooves
Edges
Other difficult-to-access areas
The system supports both static and dynamic measurement modes to meet different application requirements.
🔹 High Stability and Environmental Compensation
Built-in temperature and humidity compensation technology, combined with vibration-resistant structural design, ensures high accuracy and long-term stable operation in various environments, including:
Cleanrooms
Pilot production lines
Laboratory environments
Outdoor testing conditions
🔹 Open Data Connectivity and System Compatibility
Supporting multiple communication interfaces, including:
USB
Ethernet
RS485
WiFi
The instrument can be seamlessly integrated with factory systems such as MES and QMS, enabling automated data storage, management, and full traceability of measurement records.
3
Application Fields
▪ Semiconductor Wafer and Photomask Inspection
▪ Optoelectronic Display and Glass Substrate Manufacturing
▪ Precision Machinery and Optical Component Processing
▪ Medical Devices and High-Cleanliness Production Lines
▪ Material Surface Cleanliness Evaluation and Certification
4
Technical Specifications
| Item | Specification |
|---|---|
| Model | SPC-310ST |
| Flow Rate | 28.3 L/min |
| Light Source | In-house developed semiconductor laser diode |
| Particle Size Channels | 0.3, 0.5, 1.0, 3.0, 5.0, 10.0 μm |
| Maximum Particle Concentration | 1,000,000 particles/ft³ |
| Self-Cleaning Time | ≤10 min |
| Measurement Cycles | 0–99 cycles Cycle time: 3–300 s Delay time: 0–999 s |
| Cleanliness Classification | SCP Level |
| Data Units | N/cm², N/in², N/m² |
| SCP Classification Range | Grade 1–8 |
| Surface Probe Type | Circular |
| Surface Probe Sizes | Diameter: 15, 20, 30, 50, 70 mm Standard configuration: 50 mm surface probe |
| Function | Automatically calculates the tested surface area according to probe geometry (e.g., circular diameter or rectangular length × width), and directly determines the SCP cleanliness grade |
| Power Supply | Removable rechargeable lithium battery; DC 24V charging |
| Printing Function | Thermal printer |
| Data Storage | ≥100,000 data records |
| Weight | 8.5 kg |
| Dimensions | 250 mm (W) × 210 mm (H) × 255 mm (D) (excluding air nozzle, handle, and other accessories) |
About Lasensor
Shanghai Lasensor Photoelectric Technology Co., Ltd. was founded based on scientific achievements from the Shanghai Institute of Optics and Fine Mechanics (SIOM) and was incubated in Jiading Zhongke Shenguang Industrial Park in 2017.
The company is dedicated to the research, development, and manufacturing of accurate, efficient, and real-time measurement and diagnostic instruments based on laser detection technology.
Lasensor is currently one of the few manufacturers worldwide capable of providing a complete range of 0.1 μm particle counter solutions, with counting efficiency comparable to leading international particle counter brands. We are committed to providing customers with:
Excellent cost-performance solutions
Professional technical support
Flexible customization services
With outstanding performance and reliability, Lasensor products have gained extensive recognition in both domestic and international markets. Our products have been successfully exported to Southeast Asian countries and regions, including Vietnam, Thailand, Malaysia, and Singapore, as well as European and Oceanian markets such as Italy, Belgium, and New Zealand, earning widespread trust from global customers.
Lasensor looks forward to cooperating with partners worldwide and becoming a reliable technology partner supporting the development of smart cities and intelligent manufacturing.
