A common misconception exists in cleanroom management: meeting airborne particle cleanliness requirements means the production environment is completely clean. In reality, invisible particles as small as 0.1 μm and 0.5 μm can easily settle and attach to equipment surfaces, product surfaces, walls, and floors. These static particles are major hidden risks that can lead to product defects, cross-contamination, and compliance issues.

Traditional airborne particle counters can only detect suspended particles in the air and cannot identify surface-attached contaminants, which may result in a false perception of cleanliness and lead to unnecessary losses such as product rejection. Surface particle counters enable direct detection of surface particles through rapid, non-contact sampling, providing quantitative evaluation of cleaning effectiveness and accurate identification of contamination sources. They not only meet compliance requirements such as ISO 14644 and GMP, but also help reduce product defect rates at the source and ensure stable production processes.

Therefore, a professional surface particle counter is an essential inspection tool for clean manufacturing environments.

Product Overview

The Surface Particle Counter is a high-sensitivity detection instrument designed for advanced manufacturing, semiconductor processes, flat panel displays, and precision machining industries. Utilizing light scattering detection technology and intelligent recognition algorithms, it enables real-time detection and quantitative analysis of microscopic dust, particles, and contaminants on material surfaces, helping users accurately evaluate cleanliness levels and improve production yield and quality control.

Fully developed by a domestic R&D team, the system features independently developed optical components, algorithms, and electronic systems, achieving complete localization of core technologies. It provides a high-performance particle detection solution capable of replacing imported equipment.

Testing Process

During measurement, the probe scans across the surface of the test sample. Particles on the surface are lifted by a high-pressure airflow discharged through the opening of the scanning head. These particles are then drawn through the probe tubing into the surface particle detector, where particle levels are measured and displayed as raw particle counts, particles/in², or particles/cm².

The system utilizes a solid-state laser diode light source and collection optics to detect and determine the size of particles drawn from the scanning head. The collection optics focus scattered light onto a photodetector, which converts optical pulses into electrical signals. The pulse height is proportional to particle size, enabling the system to quantify relative levels of surface contamination using laser light scattering technology.

Product Features

🔸 Highly Integrated Sampling Probe
The sampling probe integrates both inlet and exhaust paths. Made from chemically stable, anti-static, and wear-resistant materials, it effectively purges particles within the scanned area while transporting collected particles through the tubing into the detection chamber, ensuring accurate, sensitive, and reliable measurement results.

🔸 Automatic Calibration Algorithm
Automatically identifies particle types and size ranges, reducing human error and improving measurement consistency.

🔸 Real-Time Visualization and Analysis Platform
High-speed signal acquisition and data fusion algorithms enable graphical display of measurement results, including particle size distribution curves, density trends, and abnormal alarms, supporting process traceability and quality evaluation.

🔸 Modular Design for Multi-Scenario Applications
The instrument adopts a main unit + interchangeable probe design, allowing flexible inspection of complex surfaces such as flat areas, grooves, and edges. Supports switching between static and dynamic measurement modes.

🔸 High Stability and Environmental Compensation
Built-in temperature and humidity compensation and vibration-resistant design ensure high accuracy and long-term stable operation in various environments, including cleanrooms, pilot production lines, and outdoor testing conditions.

🔸 Open Data Connectivity and System Compatibility
Supports multiple communication interfaces, including USB, Ethernet, RS485, and WiFi, enabling seamless integration with MES, QMS, and other systems for automated data archiving and traceability.

Applications

· Semiconductor wafer and photomask inspection
· Optoelectronic display and glass substrate manufacturing
· Precision machining and optical component processing
· Medical device and high-cleanliness production lines
· Material surface cleanliness evaluation and certification

Technical Specifications

About  Lasensor

Shanghai Lasensor Photoelectric Technology Co., Ltd. was founded in 2017 in the CAS Light Industry Park, Jiading District, based on the scientific achievements of a research team from the Shanghai Institute of Optics and Fine Mechanics (SIOM).

The company focuses on the research, development, and manufacturing of accurate, efficient, and real-time measurement and diagnostic instruments based on laser detection technology. Today, Lasensor is one of the few manufacturers worldwide capable of providing a complete range of 0.1 μm particle counter systems, delivering particle counting performance comparable to leading international brands.

We are committed to providing superior value, excellent service, and flexible customization solutions to meet diverse customer requirements.

With outstanding performance and reliability, Lasensor products are widely trusted in the domestic market and have been successfully exported to overseas markets, including Southeast Asia (Vietnam, Thailand, Malaysia, and Singapore), as well as Italy, Belgium, New Zealand, and other countries. Our products have earned broad recognition from global customers.

Lasensor looks forward to partnering with customers worldwide to support the advancement of smart cities and intelligent manufacturing with innovative technologies.