A common misconception in cleanroom management is that meeting airborne particle requirements means the entire production environment is completely clean. In reality, invisible fine particles as small as 0.1 μm and 0.5 μm can easily settle and adhere to equipment surfaces, product surfaces, walls, and floors. These static surface particles represent a major risk factor for product defects, cross-contamination, and regulatory corrective actions.

Traditional particle counters can only detect airborne suspended particles and are unable to identify deposited surface contaminants, which may result in a “false pass” of cleanliness assessment and lead to unnecessary losses such as product rejection or scrap.

The Surface Particle Counter directly detects surface particles through non-contact rapid sampling technology, enabling quantitative evaluation of cleaning effectiveness and accurate identification of contamination sources. It not only helps meet compliance requirements such as ISO 14644 and GMP, but also reduces product defect rates at the source and ensures stable production processes.

Therefore, a professional Surface Particle Counter is an essential detection instrument for modern clean manufacturing environments.

Product Overview

The Surface Particle Counter is a high-sensitivity particle detection instrument designed for advanced manufacturing, semiconductor processes, optoelectronic displays, and precision machining applications. Utilizing laser light scattering detection technology and intelligent recognition algorithms, it enables real-time detection and quantitative analysis of microscopic dust, particles, and contaminants on material surfaces, helping users accurately evaluate cleanliness conditions and improve production yield and quality control performance.

Fully developed by a domestic R&D team, the instrument has achieved independent innovation and localization breakthroughs in its core optical system, algorithms, and electronic modules. It provides a high-performance particle detection solution capable of replacing imported equipment.

Testing Process

During measurement, the probe scans across the surface of the test sample. Particles deposited on the surface are aerodynamically mobilized by a high-pressure airflow discharged through the opening of the scanning head.

The mobilized particles are then drawn through the probe tubing into the surface particle detection unit, where particle levels are measured and recorded. The results are displayed as raw particle counts, particles/in², or particles/cm².

The system employs a solid-state laser diode light source and precision optical collection system to detect and determine the size of particles collected through the scanning head. The collection optics focus scattered light onto a photodetector, which converts optical pulses into electrical pulses. The pulse amplitude is proportional to particle size.

By utilizing laser light scattering technology, the instrument quantitatively evaluates the relative level of surface particle contamination and provides accurate surface cleanliness assessment.

Product Features

🔸 Highly Integrated Sampling Probe

The sampling probe integrates both inlet and outlet airflow channels into a compact structure. The probe is made of materials featuring excellent chemical stability, anti-static performance, and wear resistance.

While effectively sweeping particles from the scanned surface area, the probe ensures efficient transport of collected particles through the sampling tube into the optical detection chamber, delivering accurate, sensitive, and reliable measurement results.

🔸 Automatic Calibration Algorithm

The intelligent algorithm automatically identifies particle signals and classifies particle size ranges, minimizing human error and improving measurement consistency and repeatability.

🔸 Real-Time Visual Analysis Platform

High-speed signal acquisition and advanced data fusion algorithms enable intuitive graphical visualization of measurement results, including:

• Particle size distribution curves

• Particle density trends

• Abnormal contamination alerts

Providing users with clear information for process traceability and quality evaluation.

🔸 Modular Design for Multi-Scenario Applications

The instrument adopts a main unit + interchangeable probe design, allowing flexible measurement on various complex surfaces, including:

• Flat surfaces

• Grooves

• Edges

• Other hard-to-reach areas

The system supports both static and dynamic measurement modes to meet diverse application requirements.

🔸 High Stability and Environmental Compensation

With built-in temperature and humidity compensation technology and vibration-resistant design, the instrument maintains high accuracy and long-term stable operation in various environments, including:

• Cleanrooms

• Pilot production lines

• Laboratory environments

• Outdoor testing conditions

🔸 Open Data Connectivity and System Compatibility

Supporting multiple communication interfaces, including:

• USB

• Ethernet

• RS485

• WiFi

The instrument can be seamlessly integrated with factory management systems such as MES and QMS, enabling automated data storage, management, and full traceability of inspection records.

Application Fields

· Semiconductor Wafer and Photomask Inspection

· Optoelectronic Display and Glass Substrate Manufacturing

· Precision Machinery and Optical Component Processing

· Medical Devices and High-Cleanliness Production Lines

· Material Surface Cleanliness Evaluation and Certification

Technical Specifications

About Lasensor

Shanghai Lasensor Photoelectric Technology Co., Ltd. was founded based on scientific achievements from the Shanghai Institute of Optics and Fine Mechanics (SIOM) and was incubated in Jiading Zhongke Shenguang Industrial Park in 2017.

The company is dedicated to the research, development, and manufacturing of accurate, efficient, and real-time measurement and diagnostic instruments based on laser detection technology.

Lasensor is currently one of the limited manufacturers worldwide capable of providing a complete range of 0.1 μm particle counter solutions, with counting efficiency comparable to leading international particle counter brands. We are committed to providing customers with:

• Excellent cost-performance solutions

• Professional technical support

• Flexible customized services

With outstanding performance and reliability, Lasensor products have gained extensive recognition in both domestic and international markets. Our products have been successfully exported to Southeast Asia, including Vietnam, Thailand, Malaysia, and Singapore, and further expanded into international markets such as Italy, Belgium, and New Zealand, earning widespread recognition from global customers.

Lasensor looks forward to establishing long-term cooperation with partners worldwide and becoming a reliable technology partner supporting the development of smart cities and intelligent manufacturing.