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Products Description
Entering the era of advanced nanometer-scale manufacturing, semiconductor wafer fabrication has entered a stage where every particle matters when it comes to airborne particle control. A common misconception in the industry is that compliant measurements obtained with a 0.3 μm particle counter indicate that the production environment is safe. In reality, the opposite can be true: ultrafine particles around 0.1 μm represent one of the most critical hidden contamination risks in advanced manufacturing. A single particle can potentially cause transistor defects or even render an entire wafer unusable, making submicron contamination a critical factor affecting semiconductor yield.
Conventional particle counters available on the market are often limited in their ability to detect 0.1 μm airborne particles. As a result, hidden contamination risks in photolithography areas, etching facilities, and other critical process environments may go undetected. By the time batch defects occur and the source of contamination is investigated, significant and potentially irreversible production losses may have already occurred. Such limitations can also make it difficult to meet the stringent cleanliness control requirements associated with ISO Class 1 environments.
The LPC-S101 Particle Counter is specifically designed for high-cleanliness environments, overcoming the conventional 0.3 μm detection limitation to enable precise monitoring of 0.1 μm ultrafine particles. Combined with intelligent data management and comprehensive data traceability, the LPC-S101 supports cleanliness monitoring across multiple industries, including semiconductor manufacturing, optics, pharmaceuticals, and aerospace. By identifying airborne particle risks at an early stage, it helps establish a robust nanoscale contamination control barrier for critical production processes.
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Product Overview
LPC-S101 Particle Counter — A Nanoscale Cleanliness Barrier for Advanced Semiconductor Manufacturing
Designed specifically for high-precision cleanliness monitoring in the semiconductor industry, the LPC-S101 features 0.1 μm ultrafine particle detection technology, overcoming the conventional 0.3 μm detection limitation. It accurately captures submicron contamination particles generated by sources such as photoresist outgassing and equipment wear, meeting the stringent cleanliness requirements of advanced semiconductor processes, including ISO Class 1 environments.
The LPC-S101 complies with ISO 21501-4 and the latest Chinese national standard GB/T 29024.4-2017.
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Product Features
Breakthrough in Ultrafine Particle Detection Technology
The LPC-S101 Particle Counter is designed to measure the size and concentration of airborne particles per unit volume in clean environments. With a minimum detectable particle size of 0.1 μm, it is suitable for cleanliness monitoring in environments ranging from ISO Class 7 to ISO Class 1.
The instrument utilizes a semiconductor laser light source to deliver high detection accuracy while maintaining simple and intuitive operation, making it convenient for on-site cleanliness monitoring.
The LPC-S101 can be widely used in semiconductor, electronics, optics, chemical, food, cosmetics, pharmaceutical, healthcare, biotechnology, aerospace, and other industries.
Intelligent Data Management
7/8-inch Large Touchscreen:
Displays real-time particle concentrations across 8 channels and automatically generates ISO 14644-1 cleanliness classification reports.
High-Capacity Storage + Cloud Connectivity:
Stores up to 100,000 sets of measurement data locally, with support for time and location tags. The RS232 interface enables seamless integration with SCADA/MES systems, supporting electronic data management and traceability requirements associated with FDA 21 CFR Part 11.
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Technical Specifications
| Item | Specification |
|---|---|
| Model | LPC-S101 |
| Flow Rate | 2.83 L/min |
| Particle Size Channels | 0.1, 0.15, 0.2, 0.25, 0.3, 0.5, 1.0, 5.0 μm 8 channels |
| Counting Efficiency | 50% ± 20% @ 0.1 μm 100% ± 10% @ 0.15 μm |
| Indication Error | ≤ ±20% FS |
| Maximum Particle Concentration | 35,000 particles/L @ 10% counting loss |
| Self-Cleaning Time | ≤10 min |
| Laser Light Source | Long-life semiconductor laser |
| Display | 7-inch color touchscreen |
| Communication Interface | RS232 |
| Data Storage | ≥100,000 measurement records |
| Vacuum / Airflow System | Built-in pump with automatic internal flow control |
| Power Supply | Lithium battery; approximately 5 hours of continuous operation (AC 220 V adapter) |
| Printing | Built-in thermal printer |
| Housing | 316L stainless steel |
| Weight | 3.6 kg |
| Dimensions | 200 mm (W) × 180 mm (H) × 160 mm (D) (excluding air nozzle, handle, and other accessories) |
| Operating Environment | Temperature: 5°C–35°C Humidity: 0–98% RH, non-condensing |
| Storage Environment | Temperature: −15°C–60°C Humidity: 0–98% RH, non-condensing |
About Lasensor
Shanghai Lasensor Photoelectric Technology Co., Ltd. was founded based on scientific achievements from the Shanghai Institute of Optics and Fine Mechanics (SIOM) and was incubated at Jiading Zhongke Shenguang Industrial Park in 2017.
Lasensor is dedicated to the research, development, and manufacturing of accurate, efficient, and real-time measurement and diagnostic instruments based on laser detection technology. The company is currently one of the limited manufacturers worldwide capable of providing a complete range of 0.1 μm particle counter solutions, with counting efficiency comparable to leading international particle counter brands.
We are committed to providing customers with excellent cost-performance solutions, professional services, and flexible customized solutions.
With outstanding performance and reliability, Lasensor products have gained extensive recognition in both domestic and international markets. Our products have been successfully exported to Southeast Asia, including Vietnam, Thailand, Malaysia, and Singapore, as well as international markets such as Italy, Belgium, and New Zealand, earning widespread recognition from customers worldwide.
Lasensor looks forward to working with partners across industries to provide reliable technological support for the development of smart cities and intelligent manufacturing.
